TABLE 1

Main feature of the XPS system at the Solid State Physics Laboratory of the University of Torino

x-ray source

Model

VSW TA10

Mg Ka (1253.6 eV)
Al K
a (1486.6 eV)
(non monochromatic

twin anode source)

Thermo Scientific

XR5 microfocus monochromatic x-ray source

Al Ka (1486.6 eV)

Spot size

≈1 cm2

≈500 µm2

Spectral resolution

DE = 1.2 eV ( Mg anode )
DE = 1.0 eV ( Al anode )

DE = 0.55 eV ( Al anode )

Electron energy analyser

Model

VSW HA100 Hemispherical analyser (mean radius = 100 mm)

Fixed Analyser Transmission mode

Pass energy: 10, 22, 44, 90 eV

Fixed Retarded Ratio mode

Ratio: 5, 10, 50, 100

Working pressure

 

Of the order of 10­-7 Pa

Sample cleaning

 

Annealing at 150°C by means of an external halogen lamp

Ar ion (500-3000 eV) sputtering  (PSP ISIS3000 ion gun)

Charge compensator

 

NO

 

The instrument is based on a VARIAN VT-114 14" UHV system which includes: A 14" ID ss vacuum cylinder, nine 2 ¾" Conflat ports, poppet isolation valve and a new ss bell jar with Wheeler flange. 

A Varian SH-100 Dry Scroll and a turbo-molecular pump Varian V-70LP are used to achieve high vacuum conditions. 
Pumping equipment for UHV includes 6 triode ion pumps (VARIAN model 911-503) with a total pumping speed of 220 l/s, multi-filament titanium sublimation source, cryo panel and a supplementary 20 l/s Varian VacIon Plus 20 Star Cell diode pump located next to the x-ray source. 
Heating resistors are used to bake-out the UHV chamber. 
The working pressure is of the order of 10-7 Pa.

The XPS apparatus is equipped with two loading pre-chambers to allow a fast and easy sample transferring in and out of the vacuum system. 
The sample holder is charged in the first pre-chamber, which is pumped down up to a pressure of 10-5 Pa by means of a Varian SH-100 Dry Scroll and a Varian V-70LP turbo-molecular pump. 
The pre-heating treatment of the sample up to a temperature of 150°C can be performed in this pre-chamber by means of the sample irradiation produced by a halogen lamp (100 W) located externally to the pre-chamber, in front of a window-flange. 
Moreover, this first pre-chamber is equipped with a PSP ISIS3000 Ion Source for cleaning of sample surfaces under UHV by means of the bombardment of Ar ions with energies in the 100-3000 eV range. 
A linear magnetic drive connects, through a gate valve, the first and the second pre-chamber,which is maintained at a working pressure of 10-6 Pa by a Varian 8 l/s VacIon Plus ion pump. 
Finally, the sample holder is driven into the UHV analysis chamber by means of a second linear magnetic drive.

The apparatus is equipped with the following two x-ray sources:

The electron energy analyser is a VSW CLASS 100 hemispherical analyser with a mean radius of 100 mm, with five selectable entrance slits / apertures.

The analyser can operate both in Constant Pass Energy mode, with selectable pass energies of 10,22,44,90 eV or in Constant Retard Ratio mode with selectable ratios of 5,10,50,100.