TABLE 1 Main feature of the
XPS system at the Solid State Physics Laboratory of the University of Torino |
|||
x-ray source |
Model |
VSW TA10 Mg Ka (1253.6 eV) twin anode source) |
Thermo
Scientific XR5 microfocus monochromatic x-ray source Al Ka (1486.6 eV) |
Spot size |
≈1 cm2 |
≈500 µm2 |
|
Spectral resolution |
DE = 1.2 eV ( Mg anode
) |
||
Electron energy analyser |
Model |
VSW HA100
Hemispherical analyser (mean radius = 100 mm) |
|
Fixed Analyser
Transmission mode |
Pass energy: 10,
22, 44, 90 eV |
||
Fixed Retarded Ratio mode |
Ratio: 5, 10, 50,
100 |
||
Working pressure |
|
Of the order of 10-7
Pa |
|
Sample cleaning |
|
Annealing at 150°C
by means of an external halogen lamp |
|
Ar ion (500-3000 eV) sputtering (PSP ISIS3000 ion gun) |
|||
Charge compensator |
|
NO |
The instrument is
based on a VARIAN VT-114 14" UHV system which includes: A 14" ID ss vacuum cylinder, nine 2 ¾" Conflat
ports, poppet isolation valve and a new ss bell jar
with Wheeler flange.
A Varian SH-100 Dry
Scroll and a turbo-molecular pump Varian V-70LP are used to achieve high vacuum
conditions.
Pumping equipment for UHV includes 6 triode ion pumps (VARIAN model 911-503)
with a total pumping speed of 220 l/s, multi-filament titanium sublimation
source, cryo panel and a supplementary 20 l/s Varian VacIon Plus 20 Star Cell diode pump located next to the
x-ray source.
Heating resistors are used to bake-out the UHV chamber.
The working pressure is of the order of 10-7 Pa.
The XPS apparatus is
equipped with two loading pre-chambers to allow a fast and easy sample
transferring in and out of the vacuum system.
The sample holder is charged in the first pre-chamber, which is pumped down up
to a pressure of 10-5 Pa by means of a Varian SH-100 Dry Scroll
and a Varian V-70LP turbo-molecular pump.
The pre-heating treatment of the sample up to a temperature of 150°C can be
performed in this pre-chamber by means of the sample irradiation produced by a
halogen lamp (100 W) located externally to the pre-chamber, in front of a
window-flange.
Moreover, this first pre-chamber is equipped with a PSP ISIS3000 Ion Source for cleaning of sample
surfaces under UHV by means of the bombardment of Ar
ions with energies in the 100-3000 eV range.
A linear magnetic drive connects, through a gate valve, the first and the
second pre-chamber,which is maintained at a working
pressure of 10-6 Pa by a Varian 8 l/s VacIon
Plus ion pump.
Finally, the sample holder is driven into the UHV analysis chamber by means of
a second linear magnetic drive.
The apparatus is
equipped with the following two x-ray sources:
The electron energy analyser is a VSW CLASS 100 hemispherical analyser with a mean radius of 100 mm, with five selectable
entrance slits / apertures.
The analyser can
operate both in Constant Pass Energy mode, with selectable pass energies of
10,22,44,90 eV or in Constant Retard Ratio mode with selectable ratios of
5,10,50,100.